AlMgO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlMgO films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy


© 2014-2018