Your search for plasma enhanced atomic layer deposition publications discussing AlInN films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer epitaxy for quantum well nitride-based devices|
|2||Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures|
|3||Perspectives on future directions in III-N semiconductor research|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
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