Your search for plasma enhanced atomic layer deposition publications discussing AlxGa1-xN films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures|
|2||Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1-xN thin films at low temperatures|
|3||Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures|
|4||Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition|
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