HfNx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfNx films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
3Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
4HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
5Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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