B2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing B2O3 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
2Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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