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Sr(Ta(OEt)5-dmae)2, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Electrical properties of SrTa2O6 thin films by plasma enhanced atomic layer deposition (PEALD) |