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TDEAZr, tetrakis(diethylamido)zirconium, zirconium diethylamide, (Et2N)4Zr, CAS# 13801-49-5
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | EpiValence | 🇬🇧 | Zirconium diethylamide |
| 2 | Pegasus Chemicals | 🇬🇧 | Tetrakis(diethylamino)zirconium |
| 3 | Strem Chemicals, Inc. | 🇺🇸 | Tetrakis(diethylamino)zirconium, 99% |
| 4 | Ereztech | 🇺🇸 | Tetrakis(diethylamino) zirconium |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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