Ozone, O3, CAS# 10028-15-6

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 31 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1Al2O3A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
2Al2O3Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
3Al2O3Breakdown and Protection of ALD Moisture Barrier Thin Films
4Al2O3Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
5Al2O3Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate
6Al2O3Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
7Al2O3Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
8Al2O3Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
9B:SiO2Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
10B2O3Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
11Ga:ZnOThe Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
12Ga2O3Plasma enhanced atomic layer deposition of Ga2O3 thin films
13HfO2Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
14HfO2Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
15HfO2Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
16HfO2The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
17HfZrO2Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
18HfZrSiOSub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
19MnOxDeposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
20MnOxManganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
21SiO2Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
22SiO2Comparative study of ALD SiO2 thin films for optical applications
23SiO2Designing high performance precursors for atomic layer deposition of silicon oxide
24SiO2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
25SiO2Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
26SnO2Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
27SnO2Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
28TiO2In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
29TiO2Low temperature temporal and spatial atomic layer deposition of TiO2 films
30TiO2Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
31TiO2Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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