RuO4, ruthenium tetroxide, CAS# 20427-56-9

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
2Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy


© 2014-2018