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Air Liquide Star-Ti, Ti(CpMe3)(OMe)3, CAS# 123927-75-3

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1SrTiO3Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
2SrTiO3Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
3SrTiO3Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
4SrTiO3Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
5SrTiO3Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
6SrTiO3Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
7TiO2Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
8TiO2Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
9TiO2Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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