Cyclopentadienyl ethyl (dicarbonyl) Ruthenium, CpRu(CO)2Et, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd


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