Ti(CpMe)(OiPr)3, Methyl Cyclopentadienyl Tris (Isopropoxide) Titanium, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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