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DMDCS, Dimethyldichlorosilane, Si(CH3)2Cl2, CAS# 75-78-5
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics |