Bis(ethylcyclopentadienyl)hafnium(IV) dichloride, Hf(C2H5C5H4)2Cl2, Hf(EtCp)2Cl2, CAS# 78205-93-3

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy


© 2014-2018