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Trimethyl phosphate, TMP, (MeO)3PO , CAS# 512-56-1

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1Strem Chemicals, Inc.Trimethylphosphate, min. 97% does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1AlPxOyAtomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2FePO4Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
3LiPONAtomic Layer Deposition of the Solid Electrolyte LiPON
4LiPONSolid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
5LiPONStabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
6TiP2O7Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
7ZnPO4Plasma-enhanced atomic layer deposition of zinc phosphate


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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