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TaCl5, Tantalum Pentachloride, CAS# 7721-01-9
Where to buy
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Ereztech | 🇺🇸 | Tantalum(V) chloride |
| 2 | EpiValence | 🇬🇧 | Tantalum chloride |
| 3 | Pegasus Chemicals | 🇬🇧 | Tantalum (V) Chloride |
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Plasma Enhanced Atomic Layer Deposition Film Publications
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