Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTantalum(V) ethoxide (99.9999%-Ta)
2Pegasus ChemicalsπŸ‡¬πŸ‡§Tantalum ethoxide
3EreztechπŸ‡ΊπŸ‡ΈTantalum(V) ethoxide
4Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTantalum(V) ethoxide (99.99+%-Ta)
5GelestπŸ‡ΊπŸ‡ΈTantalum(V) Ethoxide
6DOCK/CHEMICALSπŸ‡©πŸ‡ͺTantalum(V)-ethoxide
7EpiValenceπŸ‡¬πŸ‡§Tantalum ethoxide

www.plasma-ald.com does not endorse any chemical suppliers. These links are provided for the benefit of our users. If a link goes bad, let us know.

If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email.


Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
2Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
3Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
4Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
5Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
6Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
7Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
8Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
9In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications