Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide, CAS# 6074-84-6

Where to buy

1Strem Chemicals, Inc.Tantalum(V) ethoxide (99.99+%-Ta)
2Strem Chemicals, Inc.Tantalum(V) ethoxide (99.9999%-Ta)
3EpiValenceTantalum ethoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
4Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
5Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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