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Al(CD3)3, deuterated trimethyl aluminum, deuterated TMA, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks |