Dicobalt Hexacarbonyl Tert-ButylAcetylene (CCTBA), CAS# 56792-69-9

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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