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Ir(acac)3, Iridium acetylacetonate, CAS# 15635-87-715635-87-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1IrHigh-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
2IrSystematic efficiency study of line-doubled zone plates


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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