Your search for plasma enhanced atomic layer deposition publications discussing Ferroelectricity returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks|
|2||Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors|
|3||Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing|
|4||Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate|
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