Your search for plasma enhanced atomic layer deposition publications discussing Nucleation returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas|
|2||Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma|
|3||Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition|
|4||Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals|
|5||Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers|
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