1 | Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure |
2 | Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier |
3 | Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution |
4 | Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma |
5 | Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors |
6 | Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers |
7 | Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition |
8 | Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient |
9 | Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor |
10 | Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries |
11 | Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions |
12 | Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries |
13 | Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis |
14 | Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film |
15 | Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte |
16 | GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride |
17 | Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films |
18 | Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor |
19 | Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition |
20 | Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films |
21 | Evaluation of plasma parameters on PEALD deposited TaCN |
22 | Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO |
23 | Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization |
24 | Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films |
25 | Atomic layer deposition of InN using trimethylindium and ammonia plasma |
26 | Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film |
27 | Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma |
28 | Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma |
29 | Room-Temperature Atomic Layer Deposition of Platinum |
30 | Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition |
31 | Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source |
32 | Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy |
33 | PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen |
34 | Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage |
35 | Breakdown and Protection of ALD Moisture Barrier Thin Films |
36 | Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition |
37 | Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition |
38 | Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry |
39 | Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition |
40 | Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition |
41 | Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride |
42 | Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films |
43 | Properties of AlN grown by plasma enhanced atomic layer deposition |
44 | Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes |
45 | Plasma enhanced atomic layer deposition of SiNx:H and SiO2 |
46 | Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries |
47 | Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures |
48 | Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy |
49 | Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition |
50 | Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps |
51 | Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices |
52 | Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks |
53 | Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition |
54 | Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition |
55 | Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction |
56 | Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells |
57 | Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition |
58 | Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing |
59 | Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces |
60 | Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures |
61 | Remote Plasma ALD of Platinum and Platinum Oxide Films |
62 | Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition |
63 | Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films |
64 | Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity |
65 | Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures |
66 | Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing |
67 | Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma |
68 | Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors |
69 | Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma |
70 | Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas |
71 | In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition |
72 | Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films |
73 | Evaluation of Stress Induced by Plasma Assisted ALD SiN Film |
74 | Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma |
75 | Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition |
76 | Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion |
77 | High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films |
78 | Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition |
79 | Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells |
80 | Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane |
81 | Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage |
82 | Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor |
83 | Structural and optical characterization of low-temperature ALD crystalline AlN |
84 | Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films |
85 | Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition |
86 | Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition |
87 | Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries |
88 | Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect |
89 | A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition |
90 | Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma |
91 | The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer |
92 | Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas |
93 | Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration |
94 | Plasma-Assisted Atomic Layer Deposition of Palladium |
95 | Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation |
96 | Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma |
97 | Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3 |
98 | Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma |
99 | Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution |
100 | Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier |
101 | Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition |
102 | Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia |
103 | Densification of Thin Aluminum Oxide Films by Thermal Treatments |
104 | Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma |
105 | Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma |
106 | Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals |
107 | Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si |
108 | Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier |
109 | Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications |
110 | Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films |
111 | Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation |
112 | Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films |
113 | PEALD of a Ruthenium Adhesion Layer for Copper Interconnects |
114 | Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme |
115 | Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition |
116 | A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films |
117 | TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD |
118 | Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction |
119 | Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material |
120 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide |
121 | Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries |
122 | Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3 |
123 | Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition |
124 | Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality |
125 | Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide |
126 | Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition |
127 | Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films |
128 | ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium |
129 | Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia |
130 | Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition |
131 | Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition |
132 | Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources |
133 | Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies |
134 | A route to low temperature growth of single crystal GaN on sapphire |
135 | Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors |
136 | Hydrogen plasma-enhanced atomic layer deposition of copper thin films |
137 | Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma |
138 | Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition |
139 | Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions |
140 | Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications |
141 | Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition |
142 | Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT) |
143 | Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films |
144 | ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window" |
145 | Plasma-enhanced atomic layer deposition of BaTiO3 |
146 | Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor |
147 | High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical |
148 | Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films |
149 | Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid |
150 | Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex |
151 | Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth |
152 | Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas |
153 | Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3 |
154 | Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage |
155 | Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films |
156 | Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate |
157 | Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition |
158 | High-Reflective Coatings For Ground and Space Based Applications |
159 | Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects |
160 | Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma |
161 | Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor |
162 | Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure |
163 | Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates |
164 | Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent |
165 | Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage |
166 | Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane |
167 | Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties |
168 | Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma |
169 | Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide |
170 | Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application |
171 | Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films |
172 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
173 | Plasma-enhanced atomic layer deposition of superconducting niobium nitride |
174 | Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum |
175 | Plasma-enhanced atomic layer deposition of titanium vanadium nitride |
176 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
177 | Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process |
178 | A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films |
179 | Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources |
180 | Sub-nanometer heating depth of atomic layer annealing |
181 | Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma |
182 | High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane |