Passivation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Passivation returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
2Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
3Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
4Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
5Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
6Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
7Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
8Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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