Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
4Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
6Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
7Innovative remote plasma source for atomic layer deposition for GaN devices
8The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
9Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
10Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
11Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
12Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties