Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing|
|2||Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene|
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