Fermi Level Electronic Structure Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Fermi Level Electronic Structure returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma


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