Plasma enhanced atomic layer deposition derived from earlier thermal ALD research. Early PEALD work was performed primarily on homemade ALD systems further customized with a plasma source. In recent years, multiple vendors have begun offering commercial PEALD systems to researchers. Below is a list of hardware sets identified in the literature. Click on a hardware name to see a list of papers discussing work done on that system.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
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