Publication Information

Title: The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition

Type: Journal

Info: ECS J. Solid State Sci. Technol. 2013 volume 2, issue 9, Q182-Q186

Date: 2013-06-13

DOI: http://dx.doi.org/10.1149/2.043309jss

Author Information

Name

Institution

National Tsing Hua University

National Tsing Hua University

National Tsing Hua University

National Tsing Hua University

Films

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

7732-18-5

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

10028-15-6

Deposition Temperature Range = 200-350C

557-20-0

1115-99-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Profilometry

Tencor Alpha-Step Profilometer

Resistivity, Sheet Resistance

Hall Measurements

Unknown

Mobility

Hall Measurements

Unknown

Carrier Concentration

Hall Measurements

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Microstructure

SEM, Scanning Electron Microscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Rigaku RU-H3R

Optical Properties

Spectrophotometry

Unknown

Substrates

Glass

Keywords

Notes

589

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com