Publication Information

Title: Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation

Type: Journal

Info: Microelectronics Reliability 54 (2014) 2349-2354

Date: 2014-06-18

DOI: http://dx.doi.org/10.1016/j.microrel.2014.06.013

Author Information

Name

Institution

UNESP - Univ Estadual Paulista

University of Sao Paulo

IMEC

IMEC

IMEC

IMEC

Films

Plasma HfSiOx using Unknown

Deposition Temperature Range N/A

Plasma SiO2 using Unknown

Deposition Temperature Range N/A

Plasma TiN using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

215

Disclaimer

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