Publication Information

Title: Remote Plasma ALD of Platinum and Platinum Oxide Films

Type: Journal

Info: Electrochemical and Solid-State Letters, 12 (7) G34-G36 (2009)

Date: 2009-04-27

DOI: http://dx.doi.org/10.1149/1.3125876

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma Pt using Custom

Deposition Temperature Range N/A

94442-22-5

7782-44-7

Plasma PtO2 using Custom

Deposition Temperature Range N/A

94442-22-5

7782-44-7

Thermal Pt using Custom

Deposition Temperature Range N/A

94442-22-5

7782-44-7

Plasma Pt using Custom

Deposition Temperature Range N/A

94442-22-5

7782-44-7

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000U

Dielectric Constant, Permittivity

Ellipsometry

J.A. Woollam M-2000U

Extinction Coefficient

Ellipsometry

J.A. Woollam M-2000U

Resistivity, Sheet Resistance

Four-point Probe

Unknown

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

Unknown

Density

RBS, Rutherford Backscattering Spectrometry

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Philips X'Pert MPD Diffactometer

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

NT-MDT Solver P47SPM

Substrates

Si(100)

SiO2

Keywords

Plasma-Enhanced Atomic Layer Deposition

Notes

Pt and PtO2 can be distinguished by very different dielectric functions from ellipsometry. Also PtO2 very resistive.

67

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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