Publication Information

Title: Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor

Type: Journal

Info: Nanoscale Research Letters 2014, 9:223

Date: 2014-04-11

DOI: http://dx.doi.org/10.1186/1556-276X-9-223

Author Information

Name

Institution

Technische Universit├Ąt Braunschweig

Films

Plasma Al2O3 using SENTECH

Deposition Temperature = 80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

218

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com