Publication Information

Title: Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations

Type: Journal

Info: Sensors and Actuators B 147 (2010) 653-659

Date: 2010-03-27

DOI: http://dx.doi.org/10.1016/j.snb.2010.03.065

Author Information

Name

Institution

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Films

Plasma SnO2 using Custom

Deposition Temperature Range N/A

1067-33-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

MAC Scientific Co., M18XHF

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

X-ray Pole Figure

PANalytical Xpert PRO MPD X-ray Diffractometer

Microstructure

TEM, Transmission Electron Microscope

JEOL 2100F

Microstructure

TEM, Transmission Electron Microscope

FEI Technai F20

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Seiko SPA-400

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Kratos Axis

Gas Sensing

Custom

Unknown

Substrates

TiO2(100)

TiO2(001)

TiO2(110)

TiO2(101)

Keywords

Sensors

Notes

600C post deposition anneal.

123

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