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Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
Type:
Conference Proceedings
Info:
ECS Transactions, 33 (2) 69-82 (2010)
Date:
2010-10-01
Author Information
| Name | Institution |
|---|---|
| Aileen O'Mahony | Tyndall National Institute, University College Cork |
| Scott Monaghan | Tyndall National Institute, University College Cork |
| R. Chiodo | Tyndall National Institute, University College Cork |
| Ian M. Povey | Tyndall National Institute, University College Cork |
| Karim Cherkaoui | Tyndall National Institute, University College Cork |
| R. E. Nagle | Tyndall National Institute, University College Cork |
| É. O'Connor | Tyndall National Institute, University College Cork |
| R. D. Long | Tyndall National Institute, University College Cork |
| Vladamir Djara | Tyndall National Institute, University College Cork |
| Dan O'Connell | Tyndall National Institute, University College Cork |
| F. Crupi | Università della Calabria |
| Martin E. Pemble | Tyndall National Institute, University College Cork |
| Paul K. Hurley | Tyndall National Institute, University College Cork |
Films
Thermal Al2O3
Thermal MgO
Thermal HfO2
Thermal ZrO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Interlayer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Characteristic: Breakdown Voltage
Analysis: I-V, Current-Voltage Measurements
Characteristic: Frequency Dispersion
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| GaAs |
| InGaAs |
Notes
| CV and IV work compare annealed and non-annealed samples. |
| 102 |