Publication Information

Title: Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier

Type: Journal

Info: Journal of Vacuum Science & Technology B 33, 06FG02 (2015)

Date: 2015-09-21

DOI: http://dx.doi.org/10.1116/1.4932156

Author Information

Name

Institution

University of Notre Dame

University of Notre Dame

University of Notre Dame

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 300C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

SiO2

Ni

Keywords

Notes

397

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