Publication Information

Title: Low-Temperature Deposition of Hexagonal Boron Nitride Via Sequential Injection of Triethylboron and N2/H2 Plasma

Type: Journal

Info: J. Am. Ceram. Soc., 1-8 (2014)

Date: 2014-08-06

DOI: http://dx.doi.org/10.1111/jace.13213

Author Information

Name

Institution

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Films

Deposition Temperature Range N/A

97-94-9

7727-37-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Philips X'Pert MPD Diffactometer

Transmittance

Optical Transmission

Ocean Optics HR4000CG-UV-NIR

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

PSIA XE-100E

Microstructure

TEM, Transmission Electron Microscope

FEI Tecnai G2 F30

Elemental Mapping

EDS, EDX, Energy Dispersive X-ray Spectroscopy

FEI Tecnai G2 F30

Substrates

Silicon

Quartz

Keywords

PEALD Film Development

Notes

Substrates cleaned with 2-propanol, acetone, methanol, and DI-water.

Si substrates received HF dip, DI-water rinse, and N2 dry.

Meaglow Ltd hollow cathode RF-plasma source was used.

111

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