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Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Chem. Mater. 2015, 27, 7282-7288
Date:
2015-08-17
Author Information
| Name | Institution |
|---|---|
| Calvin D. Pham | University of California - Los Angeles (UCLA) |
| Jeffrey Chang | University of California - Los Angeles (UCLA) |
| Mark A. Zurbuchen | University of California - Los Angeles (UCLA) |
| Jane P. Chang | University of California - Los Angeles (UCLA) |
Films
Plasma Bi2O3
Plasma Fe2O3
Plasma BiFeO3
Film/Plasma Properties
Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Substrates
| Si(001) |
| SrTiO3 |
| Nb:SrTiO3 |
Notes
| 538 |