Publication Information

Title: Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition

Type: Journal

Info: Journal of Power Sources, Volume 203, 1 April 2012, Pages 72-77.

Date: 2012-04-01

DOI: http://dx.doi.org/10.1016/j.jpowsour.2011.12.020

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma CoOx using Unknown

Deposition Temperature Range = 100-400C

1277-43-6

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Unknown

Unknown

Chemical Composition, Impurities

Unknown

Unknown

Density

Unknown

Unknown

Morphology, Roughness, Topography

Unknown

Unknown

Electrochemical Performance

Constant Current Charge/Discharge Cycling

Unknown

Electrochemical Performance

CV, Cyclic Voltammetry

Unknown

Electrochemical Performance

GITT, Galvanostatic Intermittent Titration Technique

Unknown

Electrochemical Performance

EIS, Electrochemical Impedance Spectroscopy

Unknown

Substrates

TiN

Keywords

Batteries

Cobalt oxide

Atomic Layer Deposition

Lithium-ion

Anode

PEALD Film Development

Notes

17

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