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Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
Type:
Journal
Info:
Plasma Processes and Polymers, 13(3), 311-315
Date:
2015-08-17
Author Information
| Name | Institution |
|---|---|
| Sergey A. Starostin | Dutch Institute For Fundamental Energy Research (DIFFER) |
| Wytze Keuning | Eindhoven University of Technology |
| Jean-Paul Schalken | Eindhoven University of Technology |
| Mariadriana Creatore | Eindhoven University of Technology |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
| Jan B. Bouwstra | FUJIFILM Manufacturing Europe B.V. |
| Mauritius C. M. (Richard) van de Sanden | Eindhoven University of Technology |
| Hindrik W. de Vries | Dutch Institute For Fundamental Energy Research (DIFFER) |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Water Vapor Transmission Rate (WVTR)
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Substrates
| PEN, Polyethylene Napthalate |
| SiO2 |
| Silicon |
| Calcium |
Notes
| 537 |