Publication Information

Title: Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers

Type: Journal

Info: Plasma Proc PolymersPPAP:PPAP201500096, author = {Starostin, Sergey A. and Keuning, Wytze and Schalken, Jean-Paul and Creatore, Mariadriana and Kessels, Wilhelmus M. M. (Erwin) and Bouwstra, Jan B. and (Richard) van de Sanden, Mauritius C. M. and de Vri

Date: 2015-08-17

DOI: http://dx.doi.org/10.1002/ppap.201500096

Author Information

Name

Institution

Dutch Institute For Fundamental Energy Research (DIFFER)

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

FUJIFILM Manufacturing Europe B.V.

Eindhoven University of Technology

Dutch Institute For Fundamental Energy Research (DIFFER)

Films

Deposition Temperature = 80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Water Vapor Transmission Rate (WVTR)

Water Vapor Transmission Rate (WVTR)

Technolox Deltaperm

Substrates

PEN, Polyethylene Napthalate

SiO2

Silicon

Keywords

Diffusion Barrier

Notes

537

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com