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Low-thermal budget flash light annealing for Al2O3 surface passivation
Type:
Journal
Info:
physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 11, pages 631--635, 2015
Date:
2015-10-12
Author Information
| Name | Institution |
|---|---|
| Daniel Kai Simon | NaMLab gGmbH |
| Thomas Henke | Technische Universität Dresden |
| Paul Matthias Jordan | NaMLab gGmbH |
| Franz P. G. Fengler | NaMLab gGmbH |
| Thomas Mikolajick | NaMLab gGmbH |
| Johann W. Bartha | Technische Universität Dresden |
| Ingo Dirnstorfer | NaMLab gGmbH |
Films
Film/Plasma Properties
Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Lifetime
Analysis: -
Substrates
Notes
| 507 |