Publication Information

Title: In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating

Type: Journal

Info: Journal of The Electrochemical Society, 158 (4) G97-G102 (2011)

Date: 2010-12-30

DOI: http://dx.doi.org/10.1149/1.3554734

Author Information

Name

Institution

National Chiao Tung University

National Chiao Tung University

Films

Plasma RuNx using Custom

Deposition Temperature = 200C

32992-96-4

1333-74-0

7727-37-9

Plasma Ru using Custom

Deposition Temperature = 200C

32992-96-4

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

JEOL JSM-6500F

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Digital Instruments Nanoscope E

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG 350

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Bede D1

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

FEI Technai F20

Chemical Composition, Impurities

AES, Auger Electron Spectroscopy

Thermo VG 350

Chemical Composition, Impurities

SIMS, Secondary Ion Mass Spectrometry

Cameca ION-TOF

Adhesion

Pull-off tensile test

Custom

Leakage Current

I-V, Current-Voltage Measurements

HP 4156B Semiconductor Parameter Analyzer

Resistivity, Sheet Resistance

Four-point Probe

Napson RT-80

Substrates

SiO2

Keywords

Interconnect

Notes

687

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com