AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments

Type:
Journal
Info:
Journal of Applied Physics 119, 085306 (2016)
Date:
2016-02-08

Author Information

Name Institution
Triratna MuneshwarUniversity of Alberta
Kenneth C. CadienUniversity of Alberta

Films



Thermal Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Notes

783