Publication Information

Title: ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications

Type: Conference Proceedings

Info: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

Date: 2014-01-26

DOI: http://dx.doi.org/10.1109/MEMSYS.2014.6765600

Author Information

Name

Institution

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

Films

Deposition Temperature Range N/A

32992-96-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Continuity

SEM, Scanning Electron Microscopy

FEI Nova

Thickness

TEM, Transmission Electron Microscope

FEI Technai 12

Chemical Composition, Impurities

XRD, X-Ray Diffraction

Siemens D5000

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

PHI 5400

Unknown

CV, Cyclic Voltammetry

Unknown

ESR, Equivalent Series Resistance

EIS, Electrochemical Impedance Spectroscopy

Unknown

Charge Capacity

Repeating Chronoamperometry

Unknown

Substrates

CNTs, Carbon NanoTubes

Silicon

Keywords

PEALD Film Development

Supercapacitor

Notes

Oxygen content of Ru film increases with temperature from 300 to 400C.

Ultratech Fiji PEALD RuO2 for carbon nanotube supercapacitor application.

117

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