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ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
Type:
Conference Proceedings
Info:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Date:
2014-01-26
Author Information
| Name | Institution |
|---|---|
| Roseanne Warren | University of California - Berkeley |
| Firas Sammoura | University of California - Berkeley |
| Alina Kozinda | University of California - Berkeley |
| Liwei Lin | University of California - Berkeley |
Films
Thermal RuO2
Film/Plasma Properties
Characteristic: Continuity
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Unknown
Analysis: CV, Cyclic Voltammetry
Characteristic: ESR, Equivalent Series Resistance
Analysis: EIS, Electrochemical Impedance Spectroscopy
Characteristic: Charge Capacity
Analysis: Repeating Chronoamperometry
Substrates
| CNTs, Carbon NanoTubes |
| Silicon |
Notes
| Oxygen content of Ru film increases with temperature from 300 to 400C. |
| Ultratech Fiji PEALD RuO2 for carbon nanotube supercapacitor application. |
| 117 |