Publication Information

Title: Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure

Type: Conference Proceedings

Info: 2014 IEEE International Reliability Physics Symposium, CD.6.1 - CD.6.5

Date: 2014-06-01

DOI: http://dx.doi.org/10.1109/IRPS.2014.6861129

Author Information

Name

Institution

University of California - Los Angeles (UCLA)

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 200C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

C-V, Capacitance-Voltage Measurements

Unknown

Unknown

I-V, Current-Voltage Measurements

Unknown

Breakdown Voltage

I-V, Current-Voltage Measurements

Unknown

Substrates

Keywords

Capacitors

Notes

249

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com