Publication Information

Title: Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Type: Journal

Info: Journal of Microelectromechanical Systems, (Volume:PP, Issue: 99) Page(s):1

Date: 2014-07-22

DOI: http://dx.doi.org/10.1109/JMEMS.2014.2335157

Author Information

Name

Institution

Stanford University

Films

Plasma TiN using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Keywords

NEMS, NanoElectricalMechanical Systems

Notes

PEALD TiN for nanoelectromechanical relay.

273

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