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Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
Type:
Journal
Info:
ECS Meeting - 18th International Meeting on Lithium Batteries
Date:
2016-06-20
Author Information
| Name | Institution |
|---|---|
| Pavel A. Novikov | Peter the Great St.Petersburg Polytechnic University |
| Maxim Yu Maximov | Peter the Great St.Petersburg Polytechnic University |
| Anatoly A. Popovich | Peter the Great St.Petersburg Polytechnic University |
| Denis V. Nazarov | Peter the Great St.Petersburg Polytechnic University |
| Aleksey O. Silin | Peter the Great St.Petersburg Polytechnic University |
| Aleksandr M. Rumyantsev | Ioffe Institute |
Films
Plasma SnO2
Thermal SnO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Conductance
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
Notes
| Meeting abstract withdrawn. |
| 776 |