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Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
Type:
Conference Proceedings
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 5, N120-N124
Date:
2013-03-08
Author Information
| Name | Institution |
|---|---|
| Valentino Longo | Eindhoven University of Technology |
| Marcel A. Verheijen | Eindhoven University of Technology |
| Fred Roozeboom | Eindhoven University of Technology |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
Films
Plasma SrTiO3
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: Ellipsometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| Silicon |
| Si3N4 |
Notes
| 595 |