Publication Information

Title: Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process

Type: Journal

Info: Thin Solid Films Volume 577, 27 February 2015, Pages 143-148

Date: 2015-01-21

DOI: http://dx.doi.org/10.1016/j.tsf.2015.01.040

Author Information

Name

Institution

Kyung Hee University

Kyung Hee University

Kyung Hee University

Films

Plasma Al2O3 using Custom

Deposition Temperature = 120C

75-24-1

7782-44-7

Plasma ZrO2 using Custom

Deposition Temperature = 120C

175923-04-3

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

TEM, Transmission Electron Microscope

Unknown

Unknown

Ellipsometry

J.A. Woollam VASE

Optical Properties

Optical Transmission

Unknown

Substrates

PEN, Polyethylene Napthalate

Keywords

Diffusion Barrier

Nanolaminate

Notes

PEALD Al2O3/ZrO2 nanolaminate for flexible display diffusion barrier

324

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