Publication Information

Title: Template-assisted synthesis of III-nitride and metal-oxide nano-heterostructures using low-temperature atomic layer deposition for energy, sensing, and catalysis applications (Presentation Recording)

Type: Conference Proceedings

Info: Proc. SPIE 9553, Low-Dimensional Materials and Devices, 95530C (August 26, 2015);

Date: 2015-08-09

DOI: http://dx.doi.org/10.1117/12.2190261

Author Information

Name

Institution

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Films

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

Review talk covering ZnO, TiO2, HfO2, ZrO2, Al2O3, AlN, GaN, InN, and BN. Difficult to determine what films used PEALD from abstract. See authors other publications for details on their plasma ALD films.

540

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