Title: Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
Info: Applied Surface Science Volume 308, 30 July 2014, Pages 328-332
IRAS, Infrared Reflection Absorption Spectroscopy
Low temperature TiO2 PEALD with TDMAT and H2O plasma.
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